IGS GAS PANEL

IGS Gas Panel

The desire to minimize the labor force has been gradually increasing in the semi-conductor and LCD field.

In accordance with this change,miniaturization of manufacturing epuipments for gas supply is also requested To meet such demand, integrated gas panel has been released from many valve manufacturers, however,there has been few problems reported when applicating such devices to the system: lack of strength,external leakage due to the wrongconnection and incomplete sealing.BIS Gas panel is our solution for such problems.

• BIS gas panel is direct type gas system with the latest technology adopted.
• This has valve body Plug-in structure and the Center Lock.
• It is perfectly sealed and removable with a simple operation.
• Combined with U-shaped middel joint, no mechanical sealing is made.
• Strong against external force and has high reliable sealing ability.
• adopt the shortest flow path to aim the minimized internal
• BSI-F has newly adopted Base Rail method, and connected the upper component wi flange. This enables the removal to only one direction.
• The exchange of the flow and the joint is very handy.

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